A lithographic apparatus including an illumination system configured to
provide a beam of radiation; a support configured to support a patterning
device, the patterning configured to impart the projection beam with a
pattern in its cross-section; a substrate table configured to hold a
substrate; a projection system configured to project the patterned beam
onto a target portion of the substrate; at least one mounting bracket
configured to couple a second part of the apparatus to a first part
thereof, the mounting bracket including a first rigid part, a second
rigid part, and an elastic part connecting the first and second rigid
parts, wherein a fixing mechanism is provided to fix the positions of the
first rigid part and the second rigid part with respect to each other,
the elastic part being less rigid than each of the rigid bracket parts,
and the fixing mechanism is configured to couple the first and second
rigid parts of the mounting bracket substantially by form fixation.