The present invention relates generally to compositions and associated
methods for chemical-mechanical polishing of substrate surfaces having at
least one feature thereon comprising tungsten and at least one feature
thereon comprising a dielectric material. The compositions and associated
methods of the invention result in similar removal rates of both the
tungsten and the dielectric material. Compositions used in the methods of
the present invention typically have a pH from about 1.5 to about 3.5 and
comprise periodic acid and colloidal silica.