There is provided a positive type resin composition comprising (A) a resin
component comprising within the principal chain a structural unit derived
from a (meth)acrylate ester and incorporating an acid dissociable,
dissolution inhibiting group containing a polycyclic group on an ester
side chain section, for which the solubility in alkali increases under
the action of acid, (B) an acid generator component which generates acid
on exposure, and (C) an organic solvent, wherein the component (A)
comprises both a structural unit derived from a methacrylate ester and a
structural unit derived from an acrylate ester. According to such a
resist composition, a resist pattern can be formed which displays little
surface roughness and line edge roughness on etching, and also offers
excellent resolution and a wide depth of focus range.