A 5-methylene-1,3-dioxolan-4-one derivative and a monomer and copolymer
thereof and a resist composition containing the polymer or copolymer
where the 5-methylene-1,3 -dioxolan-4-one derivative is of formula (1):
##STR00001## wherein R.sup.1 represents a bridged cyclic hydrocarbon
group containing 4 to 16 carbon atoms, or a linear or branched alkyl
group containing 1 to 6 carbon atoms which has a bridged cyclic
hydrocarbon group containing 4 to 16 carbon atoms as a substituent;
R.sup.2 represents a hydrogen atom, or a linear or branched alkyl group
containing 1 to 6 carbon atoms; or R.sup.1 and R.sup.2 represent a
bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms together
with the carbon atom to which they are bound, provided that the alkyl
group and the bridged cyclic hydrocarbon group may have at least one
substituent selected from a group consisting of a linear or branched
alkyl group containing 1 to 6 carbon atoms which may be optionally
substituted, a hydroxy group, a carboxy group, an acyl group containing 2
to 6 carbon atoms, an alkoxy group containing 1 to 6 carbon atoms, and a
carboxy group esterified with an alcohol containing 1 to 6 carbon atoms.