A novel surface acoustic wave device with a decreased velocity dispersion
and a low insertion loss as well as the fabrication method therefor is
provided. The surface acoustic wave device includes a substrate, an
insulating layer with an indentation on the substrate, a silicon layer
with a first portion on the insulating layer and a second portion
suspended above the indentation, a piezoelectric layer on the first and
the second portions of the silicon layer, and at least an electrode on
the piezoelectric layer.