3D accelerometer for measuring three components of inertial force (or
acceleration) vector with respect to an orthogonal coordinate system,
which has high sensitivity due to a big proof mass located within a
cavity beneath the surface of the sensor die. The size of the cavity and
the size of the proof mass exceed the corresponding overall dimensions of
the elastic element. The sensor structure occupies a very small area at
the surface of the die increasing the area for ICs need to be integrated
on the same chip.