Provided are a semiconductor probe with a resistive tip, and a method of
fabricating the semiconductor probe. The method includes forming a
stripe-shaped mask layer on a substrate doped with a first impurity, and
forming first and second electrode regions by heavily doping portions of
the substrate not covered by the mask layer with a second impurity
opposite in polarity to the first impurity; annealing the substrate to
decrease a gap between the first and second semiconductor electrode
regions, and forming resistive regions lightly doped with the second
impurity at portions contiguous with the first and second semiconductor
electrode regions; forming a stripe-shaped first photoresist orthogonal
to the mask layer, and etching the mask layer such that the mask layer
has a square shape; forming a second photoresist on the substrate to
cover a portion of the first photoresist and define a cantilever region;
forming the cantilever region by etching portions not covered by the
first and second photoresists; and removing the first and second
photoresists, and forming a resistive tip having a semi-quadrangular
pyramidal shape by etching portions of the substrate not covered by the
mask layer.