This invention provides a polishing medium for chemical-mechanical
polishing, comprising an oxidizing agent for a conductor, a
protective-film-forming agent for protecting a metal surface, an acid,
and. water; (1) the polishing medium having a pH of 3 or less, and the
oxidizing agent being in a concentration of from 0.01 to 3% by weight, or
(2) the polishing medium containing abrasive grains having an average
particle diameter of 50 nm or less, and the abrasive grains having
standard deviation of particle size distribution in a value of more than
5 nm.