A method for the simultaneous double-side grinding of a plurality of
semiconductor wafers, involves a process wherein each semiconductor wafer
lies such that it is freely moveable in a cutout of one of a plurality of
carriers caused to rotate by means of a rolling apparatus and is thereby
moved on a cycloidal trajectory, wherein the semiconductor wafers are
machined in material-removing fashion between two rotating working disks,
wherein each working disk comprises a working layer containing bonded
abrasive. The method according to the invention makes it possible, by
means of specific kinematics, to produce extremely planar semiconductor
wafers.