Disclosed is a coating liquid for forming an amorphous silica-based
coating film having a low dielectric constant of 3.0 or below and low
leakage current, and a method for preparing the coating liquid. The
coating liquid is a liquid composition comprising (a) silicon compound
obtained by hydrolyzing tetraalkyl orthosilicate (TAOS) and alkoxysilane
(AS) in the presence of tetraalkyl ammonium hydroxide (TAAOH) and water,
or a silicon compound obtained by hydrolyzing or partially hydrolyzing
tetraalkyl orthosilicate (TAOS) in the presence of tetraalkyl ammonium
hydroxide (TAAOH) and water, mixing the hydrolyzed or partially
hydrolyzed product with alkoxysilane (AS) or a hydrolyzed or partially
hydrolyzed product thereof, and hydrolyzing all or a portion of the
mixture, (b) an organic solvent, and (c) water. The coating liquid is
characterized in that a quantity of water contained in the liquid
composition is in the range from 30 to 60% by weight.