A new method and structure is provided for the creation of a semiconductor
inductor. Under the first embodiment of the invention, a semiconductor
substrate is provided with a scribe line in a passive surface region and
active circuits surrounding the passive region. At least one bond pad is
created on the passive surface of the substrate close to and on each side
of the scribe line. A layer of insulation is deposited, a layer of
dielectric is deposited over the layer of insulation, at least one bond
pad is provided on the surface of the layer of dielectric on each side of
the scribe line. At least one inductor is created on each side of the
scribe line on the surface of the layer of dielectric. A layer of
passivation is deposited over the layer of dielectric. The substrate is
attached to a glass panel by interfacing the surface of the layer of
passivation with the glass panel. The substrate is sawed from the
backside of the substrate in alignment with the scribe line. The silicon
that remains in place in the passive surface of the substrate underneath
the scribe lines is removed by etching, the glass panel is separated
along the scribe line. Under the second embodiment of the invention, the
inductor is created on the surface of a thick layer of polymer that is
deposited over the layer of passivation.