A device for manufacturing a capacitive pressure measurement includes an
insulated base electrode, a mechanically deflectable counterelectrode
composed of a layer made of at least one of a monocrystalline and
polycrystalline semiconductor material, a contact arrangement for
electrically connecting the electrodes, and at least one semiconductor
component, all integrated onto a semiconductor substrate. The connection
for the base electrode is formed by an electrically insulated conductive
polycrystalline semiconductor layer. The method for manufactured the
device includes the step of arranging a conductive polycrystalline
semiconductor layer between two insulating layers on the semiconductor
substrate for forming a base electrode.