A method of forming a double-sided capacitor using at least one
sacrificial structure, such as a sacrificial liner or a sacrificial plug.
A sacrificial liner is formed along sidewalls of at least one opening in
an insulating layer on a semiconductor wafer. A first conductive layer is
then formed over the sacrificial liner. The sacrificial liner is then
selectively removed to expose a first surface of the first conductive
layer without damaging exposed components on the semiconductor wafer.
Removing the sacrificial liner forms an open space adjacent to the first
surface of the first conductive layer. A dielectric layer and a second
conductive layer are formed in the open space, producing the double-sided
capacitor. Methods of forming a double-sided capacitor having increased
capacitance and a contact are also disclosed. In addition, an
intermediate semiconductor device structure including at least one
sacrificial structure is also disclosed.