The present invention provides novel fluorine-containing copolymers which
comprise at least one fluorinated olefin, at least one polycyclic
ethylenically unsaturated monomer with a fused 4-membered heterocyclic
ring and, optionally, other components. The copolymers are useful for
photoimaging compositions and, in particular, photoresist compositions
(positive-working and/or negative-working) for imaging in the production
of semiconductor devices. The copolymers are especially useful in
photoresist compositions having high UV transparency (particularly at
short wavelengths, e.g., 157 nm) which are useful as base resins in
resists and potentially in many other applications.