Vertical field effect transistors having a channel region defined by at
least one semiconducting nanotube and methods for fabricating such
vertical field effect transistors by chemical vapor deposition using a
spacer-defined channel. Each nanotube is grown by chemical vapor
deposition catalyzed by a catalyst pad positioned at the base of a
high-aspect-ratio passage defined between a spacer and a gate electrode.
Each nanotube grows in the passage with a vertical orientation
constrained by the confining presence of the spacer. A gap may be
provided in the base of the spacer remote from the mouth of the passage.
Reactants flowing through the gap to the catalyst pad participate in
nanotube growth.