A stage apparatus includes a Y-direction deformable body including a
stationary support member, a movable support member and a pair of
X-direction leaf springs to form a substantially rectangular shape in a
free state; and an X-direction deformable body, positioned in the
Y-direction deformable body, including a connecting member, a support
member and a pair of Y-direction leaf springs to form a substantially
rectangular shape in a free state. The support member of the X-direction
deformable body includes a support member joint portion which joins the
support member to the movable support member of the Y-direction
deformable body. The X-direction deformable body and the Y-direction
deformable body are integrally molded by synthetic resin together with
the support member joint portion.