The present invention is a method for producing a single crystal in
accordance with Czochralski method by flowing an inert gas downward in a
chamber 1 of a single crystal-pulling apparatus 11 and surrounding a
single crystal 3 pulled from a raw material melt 2 with a gas flow-guide
cylinder 4, wherein when a single crystal within N region outside OSF
region generated in a ring shape in the radial direction of the single
crystal is pulled, the single crystal within N region is pulled in a
condition that flow amount of the inert gas between the single crystal
and the gas flow-guide cylinder is 0.6 D(L/min) or more and pressure in
the chamber is 0.6 D(hPa) or less, in which D (mm) is a diameter of the
single crystal to be pulled. It is preferable that there is used the gas
flow-guide cylinder that Fe concentration is 0.05 ppm or less, at least,
in a surface thereof. Thereby, there is provided a method for producing a
single crystal, wherein in the case that a single crystal is produced by
an apparatus having a gas flow-guide cylinder in accordance with CZ
method, the single crystal has low defect density and Fe concentration
can be suppressed to be 1.times.10.sup.10 atoms/cm.sup.3 or less even in
a peripheral part thereof.