In one implementation, a method is provided for testing a plasma reactor
multi-frequency matching network comprised of multiple matching networks,
each of the multiple matching networks having an associated RF power
source and being tunable within a tunespace. The method includes
providing a multi-frequency dynamic dummy load having a frequency
response within the tunespace of each of the multiple matching networks
at an operating frequency of its associated RF power source. The method
further includes characterizing a performance of the multi-frequency
matching network based on a response of the multi-frequency matching
network while simultaneously operating at multiple frequencies. In one
embodiment, a plasma reactor multi-frequency dynamic dummy load is
provided that is adapted for a multi-frequency matching network having
multiple matching networks. Each of the multiple matching networks being
tunable within a tunespace. The plasma reactor dynamic dummy load being
capable of simultaneously providing a frequency response within the
tunespace of each of the multiple matching networks at the operating
frequency of its associated RF power source.