An object of the present invention is to provide an appearance inspection
apparatus that can change the method of illumination, the shape of
illumination light, and a spatial filter for the projection of an image
of a sample dynamically during inspection, and also to provide a
projection method for projecting the image of the sample. Illumination
optics 12 and 13 and imaging optics 21 and 22 in the appearance
inspection apparatus are respectively configured to form reflecting
optical systems with mirror array devices 16 and 26 disposed at points
conjugate to the pupil position 8 of an objective lens 3. The mirror
array devices 16 and 26 are controlled in accordance with the
field-of-view position of the objective lens 3 on the sample.