An apparatus and method for optically characterizing the reflection and
transmission properties of a sample with a beam of light having a small
diameter on a surface of the sample over a broadband of wavelengths, from
190 nm to 1100 nm. Reflective optical components, including off-axis
parabolic mirrors with a collimated incident or reflected broadband beam
of light, minimize non-chromatic aberration. Angles of incidence and
reflection from optical components and the sample are kept substantially
near normal to the optical components and the sample to minimize changes
in the polarization of the beam of light. The apparatus and method
further disclose an optical light path that can be focused by adjusting
the position of an off-axis parabolic mirror and a planar mirror.