Integrated inspection and test systems for liquid crystal display (LCD)
active plates. The integrated inspection and test systems may combine
visual imaging inspection and an electronic sensing such as voltage
imaging, electron beam sensing or charge sensing, in which the potential
defect information obtained by the visual inspection system is combined
with the potential defect information obtained by the electronic sensing
system to produce a defect report. One or more high-resolution visual
cameras are scanned over a stationary plate, and the image data from the
camera(s) is processed to detect potential defects. A high-resolution
electronic sensing system examines the stationary plate, and the image
data from the sensor(s) is processed to detect potential defects. The
potential defects from the visual image data and electronic sensing image
data are processed to produce the final defect information.