An exposure apparatus includes a projection optical system for projecting
an exposure pattern, onto an object to be exposed, and a measuring
apparatus for measuring, as an interference fringe, optical performance
of the projection optical system, wherein the measuring apparatus
includes an optical element having opposing first and second surfaces,
wherein the first surface has a first measurement pattern, and the second
surface has a second measurement pattern and is closer to the projection
optical system than the first measurement pattern, and wherein the
measuring apparatus introduces light into the projection optical system
via first and second measurement patterns.