A method for manufacturing a liquid jetting head includes manufacturing a
piezoelectric element having consistently high piezoelectric
characteristics that obtains a degree of orientation that is suitable for
a piezoelectric thin film, that is stable, and that has good
reproducibility. A Ti film is formed on a layered bottom electrode,
piezoelectric material layers constituting a piezoelectric thin film are
formed in a plurality of cycles of layer formation, and a top electrode
is formed on the piezoelectric thin film to produce a piezoelectric
element. When the piezoelectric material layers are formed, the annealing
temperature of the first cycle of layer formation is set higher than the
annealing temperature of the other cycles of layer formation. In
addition, the annealing time of the first cycle of layer formation is
made longer than the annealing time of the other cycles of layer
formation. The degree of orientation in the 100 plane is thereby
increased, and the bottom electrode can be prevented from undergoing
oxidation or Pd diffusion.