The invention is directed to a collector mirror for short-wavelength
radiation based on a plasma. It is the object of the invention to find a
novel possibility for managing the temperature of a collector mirror for
focusing short-wavelength radiation generated from a plasma which allows
an efficient thermal connection to be produced between the optically
active mirror surface and a thermostat system without the disadvantages
relating to space requirements or high-precision manufacture of the
collector mirror. This object is met, according to the invention, in that
the collector mirror has a solid, rotationally symmetric substrate which
comprises a material with high thermal conductivity of more than 50 W/mK
and in which channels for cooling and temperature management are
incorporated in the substrate so that a heat transport medium can flow
through directly and for rapidly stabilizing the temperature of the
optically active mirror surface. Heat of transient temperature spikes
which occur in pulsed operation for plasma generation at the mirror
surface and which temporarily exceed the temperature average by a
multiple is quickly dissipated.