According to the invention, the thin film having the thickness controlled
desirably can be easily formed using common semiconductor processes.
Provided is a coating liquid for forming the porous film having an
excellent dielectric property and mechanical property. Specifically, the
coating liquid for forming a porous film comprises the condensation
product obtained by condensation of one or more silicate compounds
represented by the formula (X.sub.2O)
.sub.i(SiO.sub.2).sub.j(H.sub.2O).sub.k and one more organosilate
compounds represented by the formula
(X.sub.2O).sub.a(RSiO.sub.1.5).sub.b(H.sub.2O).sub.c. Thus, the porous
insulating film having sufficient mechanical strength and dielectric
properties for use in the semiconductor manufacturing process can be
manufactured.