A thin-film magnetic head having little temperature rise in the element,
good heat dissipation and a short magnetic path length (narrow coil
pitch) and manufacturing method for same is provided. To form the coil of
the thin-film magnetic head, a lower coil is first formed and after
forming alumina and an inorganic compound containing alumina, a trench is
formed for the upper coil by reactive ion etching. The lower coil allows
uniform etching at this time and functions as a film to prevent loading
effects occurring during reactive ion etching. This trench is then plated
in copper and chemical mechanical planarization performed to form the
upper layer coil as the dual-layer coil of the present invention. Heat
from the coil is efficiently radiated towards the substrate by alumina
and an inorganic compound containing alumina with good heat propagation.
The ratio of alumina or inorganic compound containing alumina in the
lower coil can be selected by reactive ion etching so that an upper coil
trench functioning as an etching stopper can be securely formed to allow
forming a stable coil film thickness and a short magnetic path length.