A semiconductor device with a metallic region can have a resistance to stress migration and increased reliability. A lower layer wiring made from a barrier metal film (102) and a copper containing metallic film (103) can be formed within an insulating film (101). An interlayer insulating film (104 or 104a and 104b) can be formed thereon. An upper layer wiring made from a barrier metal film (106 or 106a and 106b) and a copper containing metallic film (111 or 111a and 111b) is formed within the interlayer insulating film (104 or 104a and 104b). A silver containing metallic protective film (108a and 108b) can be formed on surfaces of the lower layer wiring and upper layer wiring.