The object of providing a method for manufacturing solid body electrolyte
memory cells or CB memory cells, respectively, which is suited for the
simplified manufacturing of highly dense arrays with crosspoint
architecture is solved by the present invention in that the solid body
electrolyte memory cells are manufactured by self-aligned etching of the
word lines that constitute simultaneously the top electrodes of the
memory cells, and of the CB memory cells themselves. An advantage of the
inventive method consists in that no via lithography is required, so that
the manufacturing method is easier to perform, less expensive, and yields
reliable results.