The present invention provides a polymer which has at least one or more of
a repeating unit represented by a following general formula (1a), a
repeating unit represented by a following general formula (2a) and a
repeating unit represented by a following general formula (3b), and a
repeating unit represented by a following general formula (1c), and a
positive resist composition which contains as a base resin the polymer.
Thereby, there can be provided a positive-resist composition having high
sensitivity and high resolution in exposure with a high energy beam,
wherein line edge roughness is small since swelling at the time of
development is suppressed, and the residue after development is few.
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