A method, system and medium of automation performed on a semiconductor manufacturing tool. The method creates a designed set of experiments for the tool and runs the created set of experiments. The method also collects data resulting from running the experiments and creates a model based on the collected data. The created model is used in automatically controlling the tool.

 
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< System and method for developing user interfaces purely by modeling as meta data in software application

> Manager level device/service arbitrator and methods

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