A method of detecting thin film transistor (TFT) defects in a TFT-liquid
crystal display (LCD) panel, includes, in part, applying a stress bias to
the TFTs disposed on the panel; and detecting a change in electrical
characteristics of the TFTs. The change in the electrical characteristics
of the TFTs may be detected using a voltage imaging optical system or an
electron beam. The panel temperature may be varied while the bias stress
is being applied. The change in the electrical characteristics is
optionally detected across an array of the TFTs.