To provide a coating apparatus, which can surely prevent a coating
solution from spreading, to simplify a manufacturing process and reduce
the manufacturing cost and provide a coating method using the same. The
coating apparatus includes a holding table holding a plate having a
through hole penetrating in a thickness direction; and a coating head
including a slit-shaped nozzle orifice which discharges a coating
solution, the nozzle orifice being opposed to a coating surface opposite
to a holding surface held on the holding table. The coating apparatus
applies the coating solution to the coating surface of the plate by
moving the plate and the coating head relative to each other in an
in-plane direction of the coating surface. In addition, the coating
apparatus includes coating preventing means, which prevents the coating
solution from entering the through hole of the plate.