A piezoelectric/electrostrictive film device is provided including a thin ceramic substrate and a piezoelectric/electrostrictive operating portion disposed on the substrate. The piezoelectric/electrostrictive operating portion includes a lower electrode film, a piezoelectric/electrostrictive film including a large number of crystal particles having a piezoelectric/electrostrictive composition, and an upper electrode film successively laminated on the substrate. The piezoelectric/electrostrictive composition excludes lead and contains one or more alkali metal elements selected from the group consisting of lithium, potassium, and sodium, and one or more metal elements selected from the group consisting of niobium, tantalum, antimony, and silver. Circle equivalent diameters of at least 90% of the crystal particles in the piezoelectric/electrostrictive film are in a range of 0.3 to 50 .mu.m.