A carrier head for supporting a workpiece is provided. The carrier head
comprises a mount plate having an aperture therethrough, and a clamp ring
having a foot portion and a first leg portion extending therefrom. The
first leg portion extends through the aperture, and the foot portion
abuts the mount plate proximate the aperture. A flexible bladder has
first and second ribs that are received between the mount plate and the
foot portion. An annular fastener is removably coupled to the leg
portion, and engages the mount plate to cause the first and second ribs
to be sealingly secured between the mount plate and the foot portion.