Methods and systems for determination of one or more substances within a
material are described. A flow of fluorescence-exciting/ablative energy
(e.g., laser pulse(s), preferably in the ultraviolet region (e.g.
193-nm)), is directed onto the material to ablate a thin layer of the
material using photochemical decomposition. Simultaneously, the laser
energy induces fluorescence of the substance(s) within the ablated layer
of the material. The fluorescence emitted by the substance(s) is then
received by a device, which measures the spectrum of the received
fluorescence. The fluorescence spectra are then transmitted to a spectral
processing device adapted to determine, on the basis of the fluorescence
spectra, whether the substance(s) of interest is/are present in the
material and/or the concentration at which the substance(s) of interest
is/are present in the material. This process may be repeated for each
layer of the material to determine the concentration gradient of the
substance(s) of interest in the material.