A system and method for characterizing and charging a sample. The system
includes a vacuum chamber, a first apparatus in the vacuum chamber and
configured to characterize a sample, and a second apparatus in the vacuum
chamber and configured to charge the sample. The second apparatus
includes an electron gun configured to provide an electron beam to the
sample and including an emission cathode biased to a first voltage
relative to a reference voltage, a sample holder configured to support
the sample, and a mesh located between the electron gun and the sample
holder. Additionally, the second apparatus includes a first voltage
supply configured to bias the mesh to a second voltage relative to the
sample holder, and a second voltage supply configured to bias the sample
holder to a third voltage relative to the reference voltage.