Systems, control subsystems, and methods for projecting an electron beam
onto a specimen are provided. One system includes a stage configured to
move the specimen with a non-uniform velocity. The system also includes a
projection subsystem configured to project the electron beam onto the
specimen while the stage is moving the specimen at the non-uniform
velocity. In addition, the system includes a control subsystem configured
to alter one or more characteristics of the electron beam while the
projection subsystem is projecting the electron beam onto the specimen
based on the non-uniform velocity. One method includes moving the
specimen with a non-uniform velocity and projecting the electron beam
onto the specimen during movement of the specimen. In addition, the
method includes altering one or more characteristics of the electron beam
during projection of the electron beam onto the specimen based on the
non-uniform velocity.