The disclosed invention relates to novel norborne-type monomers containing
pendent lactone or sultone groups. The invention also relates to
norborne-type polymers and copolymers containing pendent lactone or
sultone groups. These polymers and copolymers are useful in making
photoimagable materials. The photoimagable materials are particularly
suitable for use in photoresist compositions useful in 193 and 157 nm
photolithography.