A first method to compute a phase map within an optical proximity
correction simulation kernel utilizes simulated wavefront information
from randomly generated data. A second method uses measured data from
optical tools. A phase map is created by analytically embedding a
randomly generated two-dimensional array of complex numbers of wavefront
information, and performing an inverse Fourier Transform on the resultant
array. A filtering function requires the amplitude of each element of the
array to be multiplied by a Gaussian function. A power law is then
applied to the array. The elements of the array are shuffled, and
converted from the phasor form to real/imaginary form. A two-dimensional
Fast Fourier Transform is applied. The array is then unshuffled, and
converted back to phasor form.