The invention relates to an electro-optic modulator structure containing
an additional set of bias electrodes buried within the device for
applying bias to set the operating point. Thus the RF electrodes used to
modulate incoming optical signals can be operated with zero DC bias,
reducing electrode corrosion by galvanic and other effects that can be
present in non-hermetic packages. The buried bias electrodes are also
advantageous in controlling charge build-up with consequent improvement
in drift characteristics. The bias electrode material is useful for
routing bias signals inside the device, in particular to external
terminals, as well as forming encapsulating layers to permit operation in
non-hermetic environments, thereby lowering manufacturing costs.
Embodiments using both X-cut and Z-cut lithium niobate (LiNbO.sub.3) are
presented. For the latter, the bias electrodes can be split along their
axis to avoid optical losses.