An ink-jet printhead and a manufacturing method thereof include a
substrate on which a space portion is formed, a passage plate installed
on the substrate in which an ink chamber is formed to store ink, a nozzle
plate installed at a top surface of the passage plate in which a nozzle
is formed to eject the ink, and a vibration plate disposed between the
substrate and the passage plate to generate a pressure for ejecting the
ink by changing a volume of the ink chamber. The vibration plate includes
a base layer formed at a top surface of the substrate so as to cover at
least a part of the space portion, a thin film shape memory alloy layer
which contacts the ink contained in the ink chamber and varies according
to a temperature variation, a heating element disposed between the base
layer and the thin film shape memory alloy to generate heat, and an
insulating layer disposed between the heating element and the thin film
shape memory alloy layer and transfers the heat generated by the heating
element to the thin film shape memory alloy layer. Due to a stable
temperature coefficient of resistance (TCR) of the heating element, a
height and a width of a voltage supplied to the heat element can be
easily controlled, and thus power of the vibration plate can be precisely
controlled, thereby having a predetermined image quality, and the heating
element does not contact directly the ink, thereby realizing stability of
the ink-jet printhead.