An exposure apparatus to expose a substrate to light with a space between
a projection optical system and the substrate filled with liquid. The
apparatus has a stage to hold the substrate and to move, a supply unit to
supply the liquid to the space, a recovery unit to recover the liquid
from the space, a detector to detect a droplet of the liquid on at least
one of the substrate and the stage, a removing unit configured to remove
the droplet on the substrate detected by the detector, the removing unit
including a slit-shaped nozzle arranged so as to vertically sandwich the
substrate and blowing a gas on the substrate from the nozzle, a
calculation unit to calculate at least one of a position and size of the
droplet detected by the detector, and a controller to control a relative
velocity between the nozzle and the substrate based on the calculation
result of the calculation unit.