A method of determining actual properties of layered media. An incident
beam of light is directed towards the layered media, such that the
incident beam of light is reflected from the layered media as a reflected
beam of light. The actual properties of the reflected beam of light are
measured, and properties of the layered media are estimated. A
mathematical model of the layered media is solved with the estimated
properties of the layered media to yield theoretical properties of the
reflected beam of light. The mathematical model is solved using at least
one of a modified T matrix algorithm and a Z matrix algorithm. The
theoretical properties of the reflected beam of light are compared to the
actual properties of the reflected beam of light to yield a cost
function. The estimated properties of the layered media are iteratively
adjusted and the mathematical model is iteratively solved until the cost
function is within a desired tolerance. The estimated properties of the
layered media are reported as the actual properties of the layered media.