A holding system for holding an optical element. The holding system includes a ring-like inner holding member disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces, and a ring-like outer holding member disposed at an outer periphery of the inner holding member and connected to the inner holding member at plural points. The inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators.

 
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> Method and apparatus for determining chip arrangement position on substrate

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