The present invention relates to an AFM (atomic force microscope)
cantilever including a field effect transistor (FET) and a method for
manufacturing the same; and, more particularly, to a method for
manufacturing an AFM cantilever including an FET formed by a
photolithography process, wherein an effective channel length of the FET
is a nano-scale. Therefore, The present invention can easily implement a
simulation for manufacturing the AFM cantilever including the FET by
accurately controlling the effective channel length. And also, the
present invention can manufacture the AFM cantilever including the FET
having the effective channel ranging several tens to several hundreds
nanometers by applying the low price photolithography device, thereby
enhancing an accuracy and yield of the manufacturing process and
drastically reducing process costs.