A high power narrow band, high repetition rate laser light source optical
improvement apparatus and methods are disclosed with a fast angularly
positionable mirror having a mirror mounting frame, a reflective optic
with a coefficient different from that of the mounting frame, at least
one flexure mount fromed in the mounting frame that is flexible having
flexure arm attached the flexture to the mounting frame. The apparatus
may include a flexure force mechanism having an elongated rod. The force
mechanism may pre-stress the flexure. The mirror maybe a grating which
includes a substrate with metallic layer formed on the substrate, and a
protective coating made of silica formed on the reflective metallic
layer. The grating maybe actively tuned using an electro- or
magneto-sensitive element. Oxides of the metal in the reflective layer
may be removed by a hydrogen purge system exposed to deep ultraviolet
radiation.