Embodiments of the invention generally provide a fluid processing
platform. The platform includes a mainframe having a substrate transfer
robot, at least one substrate cleaning cell on the mainframe, and at
least one processing enclosure. The processing enclosure includes a gas
supply positioned in fluid communication with an interior of the
processing enclosure, a first fluid processing cell positioned in the
enclosure, a first substrate head assembly positioned to support a
substrate for processing in the first fluid processing cell, a second
fluid processing cell positioned in the enclosure, a second head assembly
positioned to support a substrate for processing in the second fluid
processing cell, and a substrate shuttle positioned between the first and
second fluid processing cells and being configured to transfer substrates
between the fluid processing cells and the mainframe robot.