The object of providing a non-volatile semiconductor memory that stands
out by good scalability and a high retention time as well as ensures low
switching voltages at low switching times and achieves a great number of
switching cycles at good temperature stability is solved by the present
invention with a semiconductor memory whose memory cells comprise at
least one silicon matrix material layer with open or disturbed
nanocrystalline or amorphous network structures and structural voids
which has a resistively switching property between two stable states,
utilizing the ion drift in the silicon matrix material layer. The memory
concept suggested in the present invention thus offers an alternative to
the flash and DRAM memory concepts since it is not based on the storing
of charges, but on the difference of the electric resistance between two
stable states that are caused by the mobility of ions in the amorphous
silicon matrix material with an externally applied electric field.