The present invention relates to a coating composition for insulating film
production, a preparation method of a low dielectric insulating film
using the same, a low dielectric insulating film for a semiconductor
device prepared therefrom, and a semiconductor device comprising the
same, and more particularly to a coating composition for insulating film
production having a low dielectric constant and that is capable of
producing an insulating film with superior mechanical strength
(elasticity), a preparation method of a low dielectric insulating film
using the same, a low dielectric insulating film for a semiconductor
device prepared therefrom, and a semiconductor device comprising the
same. The coating composition of the present invention comprises an
organic siloxane resin having a small molecular weight, and water, and
significantly improves low dielectricity and mechanical strength of an
insulating film.