A GaN-based LED structure is provided so that the brightness and luminous
efficiency of the GaN-based LED are enhanced effectively. The greatest
difference between the GaN-based LEDs according to the invention and the
prior arts lies in the addition of a masking buffer layer and a roughened
contact layer on top of the masking buffer layer. The masking buffer
layer contains randomly distributed clusters made of a group-IV nitride
Si.sub.xN.sub.y (x,y.gtoreq.1), a group-II nitride Mg.sub.wN.sub.z
(w,z.gtoreq.1), or a group-III nitride Al.sub.sIn.sub.tGa.sub.1-s-tN
(0.ltoreq.s,t<1, s+t.ltoreq.1) heavily doped with at least a group-II
and group-IV element such as Mg and Si. The roughened contact layer, made
of Al.sub.uIn.sub.vGa.sub.1-u-vN (0.ltoreq.u,v<1, u+v.ltoreq.1),
starts from the top surface of an underlying second contact layer not
covered by the masking buffer layer's clusters, and then grows upward
until it passes (but does not cover) the clusters of the masking buffer
layer for an appropriate distance. The total internal reflection that
could have been resulted from the GaN-based LEDs' higher index of
refraction than that of the atmosphere could be avoided.